The introduction of several new dielectric materials for high-speed ultra-large-scale integration (ULSI) microelectronics has increased the necessity for metrology tools to measure the ...
The model leads to a new expression for the frequency dependence of the complex dielectric constant. The advantage of the new model is the possibility of obtaining relationships between the parameters ...
This figure categorized into 2 primary categories: off-chip light source excitation and on-chip light source excitation, distinguished by their approaches to exciting electromagnetic field hotspots.
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