This study is led by Prof. Hai-Zhou Lu and Prof. Qihang Liu (Shenzhen Institute for Quantum Science and Engineering and Department of Physics, Southern University of Science and Technology). Every ...

The deleterious effect of the dead layer on the static response of the device can be understood from the induced potentials shown in Fig. 1b. First we kept the atoms fixed to their zero-field ...

One of the main challenges of a Dual Damascene (DD) via-first process is the control of the Critical Dimensions (CDs) in the lithography of the trenches. The PhotoResist (PhR) thickness presents ...

All-solid-state batteries are expected to replace conventional batteries with a liquid electrolyte thanks to their improved safety, durability, and capacity. However, the electric double layer (EDL) ...

In the field of semiconductor manufacturing, there is still a continuous search for techniques to improve the Critical Dimension Uniformity (CDU) across the wafer. CDU improvement and general ...