The direct numerical simulation of Navier-Stokes equations in the turbulent regime is not computationally feasible either in the deterministic or (especially) in the stochastic case. Therefore, ...
Resolving problems in advanced lithography could push this technology much more into the mainstream, but that won’t be easy. The next phase of EUV development has begun—making EUV more predictable and ...
In extreme ultraviolet (EUV) lithography, stochastics are events that have random variables. These variations, called stochastic effects, sometimes cause unwanted defects and pattern roughness in ...